Copper (II) oxide thin film for methanol and ethanol sensing
نویسنده
چکیده
A nanostructured copper (II) oxide film deposited by reactive DC-magnetron sputtering technique, has been studied for static sensor response towards methanol and ethanol by operating temperature and analyte concentration modulations. The optimum operating temperature (Topt) for the sensing of methanol and ethanol is observed to be 350 ̊C and 400 ̊C, respectively. The maximum sensitivity observed for 2500 ppm methanol and ethanol is 29% and 15.4% respectively. Another important observation is that the sensitivity time reduces with analyte concentrations, where as recovery time increases. The response time of 2500 ppm methanol and ethanol is 235 s and 247 s correspondingly. Index term: Copper (II) Oxide thin films, sputtering, gas sensing, response time and recovery time. INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS, VOL. 4, NO. 4, DECEMBER 2011
منابع مشابه
Synthesis of Zinc Oxide Nanostructured Thin Film by Sol- Gel Method and Evaluation of Gas Sensing Properties
Ethanol (C2H6O) sensitivity of zinc oxide (ZnO) thin film has been studied in present work. Semiconductor thin films of zinc oxide (ZnO) were deposited onto alkali-free glass substrates by the sol–gel method and dip-coating technique. The ZnO sol was synthesized by dissolving zinc acetate dehydrate in ethanol, and then adding Tetra ethanol-amine. The as-coated films were preheated at 150 ºC fo...
متن کاملEnhanced methanol sensing performance of oblique deposited WO3 thin films
Methanol (CH3OH) is a colorless liquid with a mild odor. The wide ranges of applications, toxicity and clinical implications of methanol have made necessary to develop reliable and high-performance methanol sensors. In this paper, WO3 thin films were deposited on SiO2/Si substrates by e-beam evaporation technique under normal and oblique angles and then post-annealed at 500 °C with a flow of ox...
متن کاملSynthesis of large-area and aligned copper oxide nanowires from copper thin film on silicon substrate
Large-area and aligned copper oxide nanowires have been synthesized by thermal annealing of copper thin films deposited onto silicon substrate. The effects of the film deposition method, annealing temperature, film thickness, annealing gas, and patterning by photolithography are systematically investigated. Long and aligned nanowires can only be formed within a narrow temperature range from 400...
متن کاملAnnealing temperature effect on nanostructure and phase transition of Copper Oxide thin films
This paper addresses the annealing temperature effect on nanostructure and phase transition of copper oxide thin films, deposited by PVD method on glass substrate (at 110 nm thickness) and post annealed at different temperatures (200-400°C) with a flow of 1 cm3s-1 Oxygen. The X-ray diffraction (XRD) was employed for crystallographic and phase analyses, while atomic force m...
متن کاملCopper and iron based thin film nanocomposites prepared by radio-frequency sputtering. Part II: elaboration and characterization of oxide/oxide thin film nanocomposites using controlled ex-situ oxidation process
CuO/CuFe2O4 thin films were obtained on glass substrate by ex situ oxidation in air at 450 °C for 12 h from various starting metal/oxide nanocomposites by radio-frequency sputtering technique.The structure andmicrostructure of the films were examined using grazing incidence X-ray diffraction, Raman spectroscopy, scanning and transmission electronmicroscopies,X-ray photoelectron spectroscopy, an...
متن کامل